Deposition of mechanically hard amorphous carbon nitride films from decomposition of BrCN. Effects of substrate cooling and pulsed rf-bias voltage

Symmetry breaking in nitrogen-doped amorphous carbon: Infrared observation of the Raman-active<i>G</i>and<i>D</i>bands

James H. Kaufman, S. Metin, David D. Saperstein · Physical review. B, Condensed matter · 1989 · 736 citations

Natural Sciences, Materials Science, Physics +15

Ion beam deposited carbon nitride films: characterization and identification of chemical sputtering

Peter Hammer, Mark Baker, Cristina Lenardi et al. · Thin Solid Films · 1996 · 94 citations

Natural Sciences, Materials Engineering, Materials Science +14

Electronic and mechanical properties of carbon nitride films prepared by laser ablation graphite under nitrogen ion beam bombardment

Zhong‐Min Ren, Yuan‐Cheng Du, Zhifeng Ying et al. · Applied Physics Letters · 1994 · 93 citations

Natural Sciences, Materials Engineering, Materials Science +15

Synthesis of Amorphous Carbon Nitride Films Using Dissociative Excitation Reaction

Hidetoshi Saitoh, Hirosuke Takamatsu, Daisuke Tanaka et al. · Japanese Journal of Applied Physics · 2000 · 48 citations

Natural Sciences, Chemistry, Materials Science +13

Carbon nitride thin films prepared by reactive sputtering: Elemental composition and structural characterization

M.M. Lacerda, D. F. Franceschini, F. L. Freire et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1997 · 35 citations

Natural Sciences, Chemistry, Materials Science +17