Thin Solid Films · 1996 · 94 citations · 13 references
Natural SciencesMaterials EngineeringMaterials ScienceMaterials ChemistrySurface ScienceThin FilmsCoatingsSemiconductor Thin FilmsThin-film DepositionThin-film MaterialsChemical SputteringNitride Thin FilmsNitrides Thin FilmsSputter DepositionSputteringSputtering ProcessesSputtering Techniques
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