Concepedia

Hirosuke Takamatsu

HT

4

Publications

134

Citations

4

H-Index

2000

Active since

Affiliations

Nagaoka University of Technology(Current)

Hirosuke Takamatsu is an author at Nagaoka University of Technology specializing in engineering, chemistry, and materials science.

Top concepts

EngineeringChemistryApplied PhysicsMaterial ScienceHydrogenNanotechnologySurface ScienceCarbon-based FilmsPhysical ChemistryChemical Engineering

Publications per year

2000–2005

4

Publications

4

Synthesis of Amorphous Carbon Nitride Films Using Dissociative Excitation Reaction

Hidetoshi Saitoh, Hirosuke Takamatsu, Daisuke Tanaka et al. · Japanese Journal of Applied Physics · 2000 · 48 citations

Engineering, Chemistry, Chemical Deposition +16

Mechanism of Nitrogen Incorporation into Amorphous-CN<sub>x</sub> Films Formed by Plasma-Enhanced Chemical-Vapor Deposition of the Doublet and Quartet States of the CN Radical

Haruhiko Ito Haruhiko Ito, Noriko Ito, Tsutomu Takahashi et al. · Japanese Journal of Applied Physics · 2000 · 35 citations

Engineering, Theoretical Inorganic Chemistry, Solid-state Chemistry +20

Deposition of thin and uniform photoresist on three-dimensional structures using fast flow in spray coating

Vijay K. Singh, Minoru Sasaki, Kazuhiro Hane et al. · Journal of Micromechanics and Microengineering · 2005 · 34 citations

Uniform Photoresist, Engineering, Electron-beam Lithography +16

Limitation of Nitrogen Incorporation into the Hydrogenated Amorphous Carbon Nitride Films Formed from the Dissociative Excitation Reaction of CH<sub>3</sub>CN

Haruhiko Ito Haruhiko Ito, Noriko Ito, Tsutomu Takahashi et al. · Japanese Journal of Applied Physics · 2001 · 17 citations

Chemical Engineering, High-resolution Cn, Engineering +15

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