Haruhiko Ito Haruhiko Ito

Synthesis of Amorphous Carbon Nitride Films Using Dissociative Excitation Reaction

Hidetoshi Saitoh, Hirosuke Takamatsu, Daisuke Tanaka et al. · Japanese Journal of Applied Physics · 2000 · 48 citations

Engineering, Chemistry, Chemical Deposition +16

Mechanism of Nitrogen Incorporation into Amorphous-CN_x Films Formed by Plasma-Enhanced Chemical-Vapor Deposition of the Doublet and Quartet States of the CN Radical

Haruhiko Ito Haruhiko Ito, Noriko Ito, Tsutomu Takahashi et al. · Japanese Journal of Applied Physics · 2000 · 35 citations

Engineering, Theoretical Inorganic Chemistry, Solid-state Chemistry +20

Hardness and Structure of a-CN_x Films Synthesized by Chemical Vapor Deposition

Daisuke Tanaka, Yoshiaki Ohkawara, Noriko Itoh Noriko Itoh et al. · Japanese Journal of Applied Physics · 2000 · 34 citations

Engineering, Thin Film Process Technology, Chemistry +18

Dehydrogenation of Nitrogen-Containing Carbon Films by High-Energy He²⁺ Irradiation

Yoshiaki Ohkawara, Shigeo Ohshio, Tsuneo Suzuki Tsuneo Suzuki et al. · Japanese Journal of Applied Physics · 2001 · 32 citations

Materials Science, Nitrogen-containing Carbon Films, Chemical Engineering +15

Limitation of Nitrogen Incorporation into the Hydrogenated Amorphous Carbon Nitride Films Formed from the Dissociative Excitation Reaction of CH₃CN

Haruhiko Ito Haruhiko Ito, Noriko Ito, Tsutomu Takahashi et al. · Japanese Journal of Applied Physics · 2001 · 17 citations

Chemical Engineering, High-resolution Cn, Engineering +15