Concepedia
Sensors and Actuators A Physical · 2009 · 14 citations · 25 references
EngineeringElectrical EngineeringMechanical EngineeringMicroelectromechanical SystemsMicroelectronicsMicrofabricationMems DesignMems FabricationMems ResonatorsMicrowave FiltersMicrowave ResonatorsRf MemsMems Filter DesignMems FiltersResonant MemsResonator ArraysRf Mems Filters
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High-Q HF microelectromechanical filters
F.D. Bannon, J.R. Clark, Clark T.‐C. Nguyen · IEEE Journal of Solid-State Circuits · 2000 · 457 citations
Engineering, Electrical Engineering, Mechanical Engineering +17
An integrated CMOS micromechanical resonator high-Q oscillator
Clark T.‐C. Nguyen, Roger T. Howe · IEEE Journal of Solid-State Circuits · 1999 · 393 citations
Engineering, Electrical Engineering, Microelectronics +16
High-Q UHF micromechanical radial-contour mode disk resonators
J.R. Clark, Wan-Thai Hsu, M.A. Abdelmoneum et al. · Journal of Microelectromechanical Systems · 2005 · 275 citations
Engineering, Electrical Engineering, Microelectromechanical Systems +15
Mechanically Corner-Coupled Square Microresonator Array for Reduced Series Motional Resistance
Mustafa Demirci, Clark T.‐C. Nguyen · Journal of Microelectromechanical Systems · 2006 · 136 citations
Engineering, Electrical Engineering, Mechanical Engineering +12
Proceedings of the 1996 IEEE International Frequency Control Symposium
Ferroelectrics Ieee Ultrasonics · 1996 · 130 citations
Engineering, Electrical Engineering, Microwave Engineering +11