Accelerometer systems with built-in testing

A batch-fabricated silicon accelerometer

L. M. Roylance, James B. Angell · IEEE Transactions on Electron Devices · 1979 · 507 citations

Engineering, Electrical Engineering, Mechanical Engineering +17

Accelerometer systems with self-testable features

Henry V. Allen, S.C. Terry, Diederik W. de Bruin · Sensors and Actuators · 1989 · 123 citations

Engineering, Electrical Engineering, Systems Engineering +14

A monolithic silicon accelerometer with integral air damping and overrange protection

Philip W. Barth, F. Pourahmadi, Ralph Mayer et al. · 2003 · 94 citations

Engineering, Electrical Engineering, Mechanical Engineering +17

A miniature silicon accelerometer with built-in damping

S.C. Terry · 2003 · 34 citations

Engineering, Electrical Engineering, Mechanical Engineering +17