Concepedia

Reactive d.c. magnetron sputtering of the oxides of Ti, Zr, and Hf

William D. Sproul, Michael E. Graham, Ming‐Show Wong, P.J. Rudnik

Surface and Coatings Technology · 1997 · 47 citations · 8 references

DOI

Concepts

References

8

Pulsed magnetron sputter technology

S. Schiller, K. Goedicke, J. Reschke et al. · Surface and Coatings Technology · 1993 · 338 citations

, , +6

Ion-based methods for optical thin film deposition

Philip Martin · Journal of Materials Science · 1986 · 332 citations

, , +13

Very high rate reactive sputtering of TiN, ZrN and HfN

William D. Sproul · Thin Solid Films · 1983 · 155 citations

, , +11

Reactive direct current magnetron sputtering of aluminum oxide coatings

W.D. Sproul, Michael E. Graham, Ming‐Show Wong et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1995 · 101 citations

, , +17

Advances in partial-pressure control applied to reactive sputtering

W.D. Sproul, P.J. Rudnik, C. A. Gogol et al. · Surface and Coatings Technology · 1989 · 72 citations

, , +8