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The production of tantalum nitride film resistors using a continuous sputtering machine

Samir Abdin, C. Val

Thin Solid Films · 1979 · 10 citations · 1 references

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Natural SciencesMaterials EngineeringMaterials ScienceElectronic MaterialsSemiconductor DevicesThin FilmsMetalsSemiconductor Device MaterialsSemiconductor Thin FilmsThin Film Electrical PropertiesThin-film DepositionThin-film MaterialsNitride Thin FilmsNitrides Thin FilmsSputter DepositionSputteringSputtering Techniques

References

1

Properties of tantalum sputtered films

D. Gerstenberg, Eva Mayer · Microelectronics Reliability · 1962 · 14 citations

Natural Sciences, Materials Engineering, Materials Science +10