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Enhanced endurance life of sputtered MoSx films on steel by ion beam mixing

Materials ScienceMaterials EngineeringIon ImplantationEngineeringCorrosionSurface ScienceApplied PhysicsIon Beam MixingIon BeamEndurance LifeThin FilmsSputtered Mosx FilmsMicroelectronicsChemical Vapor DepositionThin Film Processing