Structural investigations on ultrathin Mo layers in a-Si:H with emphasis on the island–continuous layer transition

Surface Studies of Solids by Total Reflection of X-Rays

L. G. Parratt · Physical Review · 1954 · 5.1K citations

X-ray Spectroscopy, Engineering, Optical Glass +17

High-resolution electron microscopy study of x-ray multilayer structures

A. K. Petford‐Long, Mary Beth Stearns, Chung‐ke Chang et al. · Journal of Applied Physics · 1987 · 197 citations

Engineering, Microscopy, Thin Film Process Technology +16

Stress, strain, and microstructure of sputter-deposited Mo thin films

T.J. Vink, Marcel A.J. Somers, J. Daams et al. · Journal of Applied Physics · 1991 · 185 citations

Materials Science, Materials Engineering, Planar Magnetron +15

Fabrication of high-reflectance Mo–Si multilayer mirrors by planar-magnetron sputtering

D. G. Stearns, Robert Rosén, S. P. Vernon · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1991 · 160 citations

Materials Science, Normal Incidence Reflectivity, Engineering +12

Interfacial reactions on annealing molybdenum-silicon multilayers

Karen Holloway, Khiem Ba, Robert Sinclair · Journal of Applied Physics · 1989 · 159 citations

Interfacial Reactions, Engineering, Sputtered Mo-si Multilayers +17