T. Drüsedau

Energy transfer into the growing film during sputter deposition: An investigation by calorimetric measurements and Monte Carlo simulations

T. Drüsedau, Torsten Bock, Thomas-Maik John et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1999 · 70 citations

Total Energy, Engineering, Vacuum Device +20

The influence of argon pressure on the structure of sputtered molybdenum: From porous amorphous to a new type of highly textured film

F. Klabunde, M. Löhmann, J. Bläsing et al. · Journal of Applied Physics · 1996 · 56 citations

Thin Film Physics, Engineering, New Type +21

Decay length of the pressure dependent deposition rate for magnetron sputtering

T. Drüsedau, M. Löhmann, B. Garke · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1998 · 50 citations

Materials Science, Pressure Dependence, Engineering +14

A comparative study of Ge nanocrystals in SixGeyOz alloys and SiOx/GeOy multilayers

Margit Zacharias, R. Weigand, B. Dietrich et al. · Journal of Applied Physics · 1997 · 46 citations

Engineering, Dc Magnetron Sputtering, Nanoengineering +18

Vibrational, optical and electronic properties of the hydrogenated amorphous germanium-carbon alloy system

T. Drüsedau, A. Annen, Bernd Schröder et al. · Philosophical Magazine B · 1994 · 46 citations

Optical Materials, Engineering, Absorption Spectroscopy +17