M. Löhmann

The influence of argon pressure on the structure of sputtered molybdenum: From porous amorphous to a new type of highly textured film

F. Klabunde, M. Löhmann, J. Bläsing et al. · Journal of Applied Physics · 1996 · 56 citations

Thin Film Physics, Engineering, New Type +21

Decay length of the pressure dependent deposition rate for magnetron sputtering

T. Drüsedau, M. Löhmann, B. Garke · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1998 · 50 citations

Materials Science, Pressure Dependence, Engineering +14

Investigations on energy fluxes in magnetron sputter-deposition: implications for texturing and nanoporosity of metals

T. Drüsedau, M. Löhmann, F. Klabunde et al. · Surface and Coatings Technology · 2000 · 24 citations

Materials Science, Magnetism, Engineering +11

Structural investigations on ultrathin Mo layers in a-Si:H with emphasis on the island–continuous layer transition

M. Löhmann, F. Klabunde, J. Bläsing et al. · Thin Solid Films · 1999 · 23 citations

Materials Science, Oxide Heterostructures, Island–continuous Layer Transition +8

Formation of Ge nanocrystals in amorphous GeO x , and SiGeO x alloy films

Margit Zacharias, J. Bläsing, M. Löhmann et al. · Thin Solid Films · 1996 · 19 citations

Materials Science, Material Analysis, Engineering +8