F. Klabunde

Energy transfer into the growing film during sputter deposition: An investigation by calorimetric measurements and Monte Carlo simulations

T. Drüsedau, Torsten Bock, Thomas-Maik John et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1999 · 70 citations

Total Energy, Engineering, Vacuum Device +20

The influence of argon pressure on the structure of sputtered molybdenum: From porous amorphous to a new type of highly textured film

F. Klabunde, M. Löhmann, J. Bläsing et al. · Journal of Applied Physics · 1996 · 56 citations

Thin Film Physics, Engineering, New Type +21

Investigations on Microstructure, Surface Topography, and Growth Process of Sputtered Molybdenum Showing Texture Turnover

T. Drüsedau, F. Klabunde, Peter Veit et al. · physica status solidi (a) · 1997 · 38 citations

Thin Film Physics, Engineering, Thin Film Process Technology +16

Investigations on energy fluxes in magnetron sputter-deposition: implications for texturing and nanoporosity of metals

T. Drüsedau, M. Löhmann, F. Klabunde et al. · Surface and Coatings Technology · 2000 · 24 citations

Materials Science, Magnetism, Engineering +11

Structural investigations on ultrathin Mo layers in a-Si:H with emphasis on the island–continuous layer transition

M. Löhmann, F. Klabunde, J. Bläsing et al. · Thin Solid Films · 1999 · 23 citations

Materials Science, Oxide Heterostructures, Island–continuous Layer Transition +8