Concepedia

Nano-graphoepitaxy of semiconductors for 3D integration

Filip Crnogorac, D. J. Witte, Qiangfei Xia, Bipin Rajendran, D. S. Pickard, Zhi Liu, Amit Mehta, Shashank Sharma, Amir A. Yasseri, T. I. Kamins,

Microelectronic Engineering · 2007 · 10 citations · 4 references

Concepts

EngineeringMaterials EngineeringMaterials ScienceNanotechnologySemiconductor DevicesSemiconductor MaterialsNanoelectronicsNanostructured Electronic MaterialsSemiconductor Device MaterialsSemiconductor InterfacesSemiconductor NanomaterialsSemiconductor SurfacesThree-dimensional Integration

References

4

Current Topics in Materials Science

E. Kaldis, E. Sirtl · Journal of The Electrochemical Society · 1980 · 2.3K citations

Natural Sciences, Materials Engineering, Materials Science +14

Imprint Lithography with 25-Nanometer Resolution

Stephen Y. Chou, Peter R. Krauss, Preston J. Renstrom · Science · 1996 · 2.3K citations

Engineering, Electrical Engineering, Manufacturing Engineering +14

3-D ICs: a novel chip design for improving deep-submicrometer interconnect performance and systems-on-chip integration

Kaustav Banerjee, S.J. Souri, Pawan Kapur et al. · Proceedings of the IEEE · 2001 · 1K citations

Engineering, Computer Engineering, Electrical Engineering +17

Crystallographic orientation of silicon on an amorphous substrate using an artificial surface-relief grating and laser crystallization

M. W. Geis, D. C. Flanders, Henry I. Smith · Applied Physics Letters · 1979 · 246 citations

Natural Sciences, Materials Engineering, Materials Science +17