Meccanica · 2008 · 46 citations · 23 references
EngineeringMechanical EngineeringSystems EngineeringFinite Element AnalysisMicroelectromechanical SystemsSensorsDevice ReliabilityMems DesignMems ModelingMems ReliabilityMems SensorsMicroelectromechanical SensorsElectrical ReliabilityFinite Element Reliability AnalysisMems Failure AnalysisMems Reliability TestingMems Sensor TestingStress-induced FailureVibration Testing Of Mems Devices
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