Publication | Closed Access
Determination of He electronic energy loss in crystalline Si by Monte-Carlo simulation of Rutherford backscattering–channeling spectra
52
Citations
31
References
2000
Year
Crystalline SiEngineeringCrystalline DefectsPhysicsApplied PhysicsElectronic Energy LossMonte-carlo SimulationSilicon On InsulatorSilicon Debugging
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