Atomic force microscopy using cantilevers with integrated tips and piezoelectric layers for actuation and detection

Abstract

Cantilevers with integrated tip and piezoelectric layer (zinc oxide, ZnO) for actuation and detection have been microfabricated using monocrystalline silicon as the bulk material. Arrays of five levers and cantilevers with two independent ZnO layers have also been obtained. The levers have been mechanically and electrically characterized. Dynamic mode and contact mode atomic force microscopy (AFM) images were achieved using the integrated piezoelectric layer of these levers as a vertical deflection sensor.