Journal of Molecular Structure · 1999 · 30 citations · 3 references
Natural SciencesMaterials EngineeringMaterials ScienceMaterials ChemistryPhysical ChemistryThin FilmsMetal OxidesSurface OxidationThin Film Electrical PropertiesThin Film OxidationThin-film MaterialsAnodic CoatingsAnodic OxidationPhysical PropertiesSilicon DioxideSurface Oxidation MechanismsThin Oxide FilmsThin Oxide Layers
3
G. Lucovsky, M. J. Mantini, J. K. Srivastava et al. · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1987 · 395 citations