Characterization of sputtered and annealed niobium oxide films using spectroscopic ellipsometry, Rutherford backscattering spectrometry and X-ray diffraction

Miklós Serényi, T. Lohner, P. Petrík, Z. Zolnai, Zsolt E. Horváth, N.Q. Khánh

Thin Solid Films · 2008 · 33 citations · 15 references

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