Thin Solid Films · 1987 · 63 citations · 5 references
Natural SciencesMaterials EngineeringMaterials ScienceMaterials CharacterizationMechanical Behavior Of MaterialsThin FilmsMechanical CharacterizationNanomechanical PropertiesSoft MaterialsStrength Of MaterialsThin Film Mechanical PropertiesThin-film MaterialsFilm StressHardnessInternal Stress Testing ModelsMechanical Properties Of FilmsStress MeasurementThin Film Mechanics
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