Mechanical properties of thin films: Measurements of ultramicroindentation hardness, Young's modulus and internal stress - Concepedia

Concepedia

Publication | Closed Access

Mechanical properties of thin films: Measurements of ultramicroindentation hardness, Young's modulus and internal stress

63

Citations

5

References

1987

Year

Yuji Tsukamoto, Hodaka YAMAGUCHI, M. Yanagisawa

Thin Solid Films

Materials ScienceEngineeringMechanical PropertiesMechanical EngineeringApplied PhysicsUltramicroindentation HardnessMicrostructure-strength RelationshipHardnessThin FilmsPhysical PropertyMechanics Of MaterialsMicrostructureThin Film Processing

References

	Year	Citations

Page 1