Publication | Closed Access
Ultra-microhardness of vacuum-deposited films I: Ultra-microhardness tester
62
Citations
3
References
1978
Year
Materials EngineeringEngineeringMicrofabricationApplied PhysicsUltra-microhardness TesterVacuum DeviceThin FilmsMicroelectronicsThin Film ProcessingElectrical Insulation
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