Ultramicroindentation apparatus for the mechanical characterization of thin films

Abstract

An apparatus is described which is suitable for the mechanical characterization of all kinds of extremely thin films by indentation experiments at very low loads. The penetration depth can be measured as a function of time or load with a resolution of 5 nm. The indentor force can be varied from 10 μN to 5 mN. On the basis of some examples it is demonstrated that the instrument is applicable for ultramicrohardness measurements on metal films as well as for the determination of the viscoelastic properties of polymer coatings. Moreover, it is shown that the apparatus can be used for surface profilometry and ultramicroscratching experiments on relatively soft layers.