Concepedia

Wet etching of silicon gratings with triangular profiles

Joachim Frühauf, S. Krönert

Microsystem Technologies · 2005 · 42 citations · 1 references

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Concepts

EngineeringMaterials EngineeringMaterials ScienceMicrofabricationOptical MaterialsPhotonicsEtching ProcessesMask FabricationSubstrate PreparationThin Film EtchingThin Film LithographyThin-film PatterningDiffraction GratingsDry EtchingEtch Profile ControlEtchingSilicon EtchingWet Chemical EtchingWet Etching

References

1

Recent Developments in the use of the Tripod Polisher for TEM Specimen Preparation

J. Benedict, Ron Anderson, Stanley J. Klepeis · MRS Proceedings · 1991 · 91 citations

Medicine, Materials Engineering, Materials Science +7