Slope etching of silicon dioxide

Optimization of Al step coverage through computer simulation and scanning electron microscopy

I. A. Blech, D. B. Fraser, S. E. Haszko · Journal of Vacuum Science and Technology · 1978 · 33 citations · Full text

Engineering, Materials Engineering, Materials Science +17

Step coverage in the vacuum deposition of thin metal films

T. C. Tisone, J. B. Bindell · Journal of Vacuum Science and Technology · 1974 · 26 citations

Natural Sciences, Electrical Engineering, Materials Science +13