Role of surface fixed charge in the surface passivation of thermal atomic layer deposited Al2O3 on crystalline-Si - Concepedia

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Role of surface fixed charge in the surface passivation of thermal atomic layer deposited Al2O3 on crystalline-Si

11

Citations

21

References

2012

Year

Yanan Dou, Yusen He, Chun-Ping Huang, Chunlan Zhou, X. G., Ran Chen, Junhao Chu

Applied Physics A

Materials ScienceSurface CharacterizationEngineeringOxide ElectronicsSurface ScienceApplied PhysicsThermal Atomic LayerSurface PassivationSemiconductor MaterialSilicon On Insulator

References

	Year	Citations

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