Concepedia

Publication | Closed Access

Implantation of P ions in SiO2 layers with embedded Si nanocrystals

DOI

26

Citations

23

References

2004

Year

G. A. Kachurin, S. G. Cherkova, V. G. Kesler, A.K. Gutakovsky, Alexander Bublikov, D. I. Tetelbaum
Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms

References

YearCitations

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