Implantation of P ions in SiO2 layers with embedded Si nanocrystals

G. A. Kachurin, S. G. Cherkova, V. G. Kesler, A.K. Gutakovsky, Alexander Bublikov, D. I. Tetelbaum

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 2004 · 26 citations · 23 references

Concepts

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