S. G. Cherkova

Implantation of P ions in SiO2 layers with embedded Si nanocrystals

G. A. Kachurin, S. G. Cherkova, V. G. Kesler et al. · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 2004 · 26 citations

Materials Science, Ion Implantation, Engineering +10

Effect of boron ion implantation and subsequent anneals on the properties of Si nanocrystals

G. A. Kachurin, S. G. Cherkova, D. Marín et al. · Semiconductors · 2006 · 22 citations

Formation of light-emitting Si nanostructures in SiO₂by pulsed anneals

G. A. Kachurin, S. G. Cherkova, D. V. Marin et al. · Nanotechnology · 2008 · 21 citations

Engineering, Thin Sio, Optoelectronic Devices +16

Quantum Size Effects in Germanium Nanocrystals and Amorphous Nanoclusters in GeSixOy Films

M. P. Gambaryan, G. K. Krivyakin, S. G. Cherkova et al. · Physics of the Solid State · 2020 · 19 citations

Electronic structure of silicon oxynitride films grown by plasma-enhanced chemical vapor deposition for memristor application

Timofey V. Perevalov, Andrei A. Gismatulin, S. G. Cherkova et al. · Journal of Non-Crystalline Solids · 2022 · 19 citations

Materials Science, Electrical Engineering, Engineering +11