Publication | Closed Access
Fabrication of silicon oxycarbide-based microcomponents via photolithographic and soft lithography approaches
39
Citations
30
References
2011
Year
Materials ScienceEngineeringElectron-beam LithographyBeam LithographyMicrofabricationNanotechnologySoft Lithography ApproachesApplied PhysicsFabrication TechniqueNanolithographyMicro-optical ComponentSilicon Oxycarbide-based Microcomponents3D PrintingNanolithography Method
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