3-Dimensional profile distortion measured by stylus type surface profilometer

Atomic Force Microscope

G. Binnig, C. F. Quate, Ch. Gerber · Physical Review Letters · 1986 · 14.4K citations · Full text

Natural Sciences, Materials Science, Physics +14

Algorithms for scanned probe microscope image simulation, surface reconstruction, and tip estimation

John S. Villarrubia · Journal of Research of the National Institute of Standards and Technology · 1997 · 664 citations · Full text

Engineering, Biomedical Engineering, Biomedical Imaging +16

Reconstruction of STM and AFM images distorted by finite-size tips

David Keller · Surface Science · 1991 · 325 citations

Engineering, Materials Engineering, Microfabrication +7

Simulation of rough surfaces with FFT

Jiunn-Jong Wu · Tribology International · 2000 · 279 citations

Engineering, Computational Engineering, Computational Electromagnetics +10

Morphological estimation of tip geometry for scanned probe microscopy

John S. Villarrubia · Surface Science · 1994 · 277 citations

Natural Sciences, Biomedical Engineering, Biomedical Imaging +14