Concepedia

Plasma processing effects on O2-HCl grown Si-SiO2 structures

J. Kassabov, E. Atanassova, E. Goranova, D. Dimitrov, J. Vasileva

Solid-State Electronics · 1989 · 13 citations · 15 references

DOI

Concepts

References

15

<i>Techniques of Vacuum Ultraviolet Spectroscopy</i>

James A. R. Samson, Stanley S. Ballard · Physics Today · 1968 · 693 citations

, , +5

Theory of continuously distributed trap states at Si-SiO2 interfaces

Takeshi Sakurai, T. Sugano · Journal of Applied Physics · 1981 · 235 citations

, , +17

Origin of Interface States and Oxide Charges Generated by Ionizing Radiation

C. T. Sah · IEEE Transactions on Nuclear Science · 1976 · 192 citations

, , +17

Electron Mobility in Inversion and Accumulation Layers on Thermally Oxidized Silicon Surfaces

Shiyu Sun, J.D. Plummer · IEEE Journal of Solid-State Circuits · 1980 · 154 citations

, , +17

Interface states at the SiO2-Si interface

M. Schulz · Surface Science · 1983 · 113 citations

, , +14