Applied Physics Letters · 2004 · 54 citations · 13 references
EngineeringElectrical EngineeringMaterials ScienceOpticsOptoelectronicsPhotonicsOptical WaveguidesPhotonic CrystalsPhotonic Integrated CircuitsPhotonic MaterialsSemiconductor DefectsWaveguidesDevice FabricationFourier Optics AnalysisIntegrated WaveguidesIon Beam EtchingPhotonic Crystal WaveguidesReactive Ion EtchingWaveguide FabricationWaveguide Loss
We have fabricated high-quality planar photonic crystal defect waveguides in InP/InGaAsP material. Using Fourier analysis of the Fabry-Pérot fringes obtained in transmission, we derive the propagation losses. Values as small as 1.8 dB/mm for waveguides consisting of three rows of missing holes (W3) were measured. We believe that the reduction in losses is due to the high quality of etching carried out using a high beam voltage–current ratio regime of chemically assisted ion-beam etching.
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Low-loss channel waveguides with two-dimensional photonic crystal boundaries
C.J.M. Smith, H. Benisty, S. Olivier et al. · Applied Physics Letters · 2000 · 158 citations · Full text