Concepedia

Publication | Closed Access

Ion energy distributions in AZO magnetron sputtering from planar and rotatable magnetrons

DOI

34

Citations

17

References

2009

Year

Frank Richter, Thomas Welzel, Ronny Kleinhempel, Th. Dunger, T. Knoth, M. Dimer, F. Milde
Surface and Coatings Technology

References

YearCitations

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