Concepedia
Surface and Coatings Technology · 2009 · 34 citations · 17 references
Natural SciencesMaterials SciencePhysicsMagnetic MaterialsNuclear PhysicsPlasma PhysicsIonization ProcessesMagnetron SputteringSputter DepositionSputteringSputtering ProcessesSputtering Techniques
17
Transparent conducting oxide semiconductors for transparent electrodes
Tadatsugu Minami · Semiconductor Science and Technology · 2005 · 2.1K citations
Natural Sciences, Materials Engineering, Materials Science +17
Microstructural evolution during film growth
I. Petrov, P.B. Barna, Lars Hultman et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2003 · 1.7K citations
Magnetron sputtering of transparent conductive zinc oxide: relation between the sputtering parameters and the electronic properties
K. Ellmer · Journal of Physics D Applied Physics · 2000 · 590 citations
Transparent and conductive aluminum doped zinc oxide films prepared by mid-frequency reactive magnetron sputtering
Bernd Szyszka · Thin Solid Films · 1999 · 154 citations
Natural Sciences, Materials Engineering, Materials Science +14
Radiation Effect due to Energetic Oxygen Atoms on Conductive Al-Doped ZnO Films
Kikuo Tominaga, Kenji Kuroda, Osamu Tada · Japanese Journal of Applied Physics · 1988 · 109 citations