Concepedia
Thin Solid Films · 2003 · 61 citations · 18 references
Materials ScienceEngineeringDisplay TechnologyAdvanced Display TechnologyThin Film Process TechnologyChemistryThin FilmsZinc SulfideTantalum PentoxideThin Film ProcessingElectrochemistry
18
Alternative dielectrics to silicon dioxide for memory and logic devices
Angus I. Kingon, Jon‐Paul Maria, S. K. Streiffer · Nature · 2000 · 1.3K citations
Materials Science, Electrical Engineering, Engineering +7
Tantalum pentoxide (Ta2O5) thin films for advanced dielectric applications
C. Chaneliere, Jean‐Luc Autran, R. A. B. Devine et al. · Materials Science and Engineering R Reports · 1998 · 668 citations
Materials Science, Engineering, Oxide Electronics +4
Aluminum-doped zinc oxide transparent conductors deposited by the sol-gel process
Wing Man Tang, David Cameron · Thin Solid Films · 1994 · 350 citations
Materials Science, Material Analysis, Engineering +6
UV-O/sub 3/ and dry-O/sub 2/: Two-step-annealed chemical vapor-deposited Ta/sub 2/O/sub 5/ films for storage dielectrics of 64-Mb DRAMs
H. Shinriki, Masami Nakata · IEEE Transactions on Electron Devices · 1991 · 205 citations
Engineering, Vacuum Device, Photovoltaics +16
Electroluminescent zinc sulphide devices produced by sol-gel processing
Wei Tang, David Cameron · Thin Solid Films · 1996 · 140 citations
Materials Science, Engineering, Sol-gel Processing +4