Electron and Ion Beam-Enhanced Adhesion

Measurement of adhesion of thin films

Proceedings of the Royal Society of London A Mathematical and Physical Sciences · 1960 · 282 citations

Natural Sciences, Materials Engineering, Materials Science +12

Ion-beam-enhanced adhesion in the electronic stopping region

J. E. Griffith, Yuanxum Qiu, T.A. Tombrello · Nuclear Instruments and Methods in Physics Research · 1982 · 157 citations · Full text

Natural Sciences, Materials Science, Physics +9

Thin film metallization of oxides in microelectronics

D.M. Mattox · Thin Solid Films · 1973 · 119 citations

Natural Sciences, Materials Engineering, Materials Science +12

Metastable Au-Si alloy formation induced by ion-beam interface mixing

B-Y. Tsaur, J. W. Mayer · Philosophical magazine. A/Philosophical magazine. A. Physics of condensed matter. Structure, defects and mechanical properties · 1981 · 91 citations

Natural Sciences, Materials Science, Physics +17

Ion beam exposure characteristics of resists

Thomas M. Hall, Alfred Wagner, L. F. Thompson · Journal of Vacuum Science and Technology · 1979 · 74 citations

Natural Sciences, Materials Engineering, Materials Science +9