Properties of the SiH bond-stretching absorption band in a-Si:H grown by remote plasma enhanced CVD (RPECVD)

Structural interpretation of the vibrational spectra of<mml:math xmlns:mml="http://www.w3.org/1998/Math/MathML" display="inline"><mml:mi>a</mml:mi></mml:math>-Si: H alloys

G. Lucovsky, R. J. Nemanich, J. C. Knights · Physical review. B, Condensed matter · 1979 · 810 citations

Natural Sciences, Materials Science, Physics +16

Chemical effects on the frequencies of Si-H vibrations in amorphous solids

G. Lucovsky · Solid State Communications · 1979 · 602 citations

Natural Sciences, Chemistry, Physics +13

Characterized of glow-discharge deposited a-Si:H

H. Fritzsche · Solar Energy Materials · 1980 · 322 citations

Natural Sciences, Materials Science, Physics +5

Deposition of silicon dioxide and silicon nitride by remote plasma enhanced chemical vapor deposition

G. Lucovsky, P. D. Richard, D. V. Tsu et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1986 · 238 citations

Natural Sciences, Materials Engineering, Materials Science +17