Morphology Response to Strain Field Interferences in Stacks of Highly Ordered Quantum Dot Arrays

Abstract

Twofold stacked InGaAs/GaAs quantum dot (QD) layers are grown on GaAs(001) substrates patterned with square arrays of shallow holes. We study the surface morphology of the second InGaAs QD layer as a function of pattern periodicity. Comparing our experimental results with a realistic simulation of the strain energy density E(str) distribution, we find that the second InGaAs QD layer sensitively responds to the lateral strain-field interferences generated by the buried periodic QD array. This response includes the well-known formation of vertically aligned QDs but also the occurrence of QDs on satellite strain energy density minima. Our calculations show that base size and shape as well as lateral orientation of both QD types are predefined by the E(str) distribution on the underlying surface.