Applied Physics Letters · 2000 · 143 citations · 16 references
Natural SciencesMaterials EngineeringMaterials ScienceNanomaterialsNanotechnologySurface ScienceNanostructured SurfacesSelf-assembled MaterialsSelf-assembled NanostructuresSelf-assembly Of NanomaterialsStrain EngineeringSurface MorphologyNanostructured SiliconNucleation On Patterned SubstratesSelf-assembled Electronic StructuresSelf-assembly Of IslandsSilicon NanostructuresStrain EffectsStrain In NanostructuresSurface Modulation
Self-assembled growth in combination with prepatterning yields ordered lines of Ge islands on a planar Si (001) surface. The self-assembled Ge nanostructures are grown on top of a 15-period Si/SiGe superlattice, which is deposited on a prepatterned Si substrate. The pattern consists of 10 nm deep trenches with a period of 250 nm. The superlattice translates the surface modulation of the substrate into a strain-field modulation at the growth front of the superlattice. This strain field modulation provides the template for the ordered nucleation of self-assembled Ge islands. Our method gives rise to the long-range ordering of perfectly passivated nanostructures and can in principle be applied to any other strained material system.
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Self-organized growth of strained InGaAs quantum disks
R. Nötzel, Jiro Temmyo, Toshiaki Tamamura · Nature · 1994 · 374 citations