Micromachined fountain pen for atomic force microscope-based nanopatterning

Abstract

We present a tool that can be used in standard atomic force microscope and that enables chemical, chemical/mechanical, or physical surface modification using continuous liquid supply. The device consists of a reservoir micromachined into the probe support that is connected to fluidic channels embedded in a V-shaped cantilever. Via the fluidic channels, the liquid reaches the tip. The fluid transport to the sample surface is demonstrated and fountain pen lithography applications are presented.