Molecular Dynamic Simulation on the Effect of Polymer Molecular Size in Thermal Nanoimprint Lithographic (T-NIL) Process

Imprint of sub-25 nm vias and trenches in polymers

Stephen Y. Chou, Peter R. Krauss, Preston J. Renstrom · Applied Physics Letters · 1995 · 2.7K citations

Engineering, Manufacturing Engineering, Materials Science +15

Nanoimprint lithography

Stephen Y. Chou, Peter R. Krauss, Preston J. Renstrom · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1996 · 1.7K citations

Engineering, Electrical Engineering, Manufacturing Engineering +13

Entanglements at Polymer Surfaces and Interfaces

Hugh R. Brown, Thomas P. Russell · Macromolecules · 1996 · 259 citations

Natural Sciences, Chemistry, Materials Science +17

Surface Dynamics of Polymer Films

Hyunjung Kim, Laurence Lurio, J. K. Basu et al. · Physical Review Letters · 2003 · 176 citations

Natural Sciences, Chemistry, Materials Science +17

Simulation and experimental study of polymer deformation in nanoimprint lithography

Yoshihiko Hirai, Takaaki Konishi, Takashi Yoshikawa et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2004 · 173 citations

Engineering, Materials Engineering, Materials Science +17