Sensors and Actuators A Physical · 2009 · 29 citations · 20 references
EngineeringElectrical EngineeringMechanical EngineeringMicroelectromechanical SystemsMicroelectronicsMicrofabricationMems CharacterizationMems DesignMems FabricationMems ResonatorsMems TestingSignal AmplificationAmplificationElectromechanical TransductionExperimental Study DesignNonlinear AmplificationParametric Amplification
20
Modal Testing: Theory and Practice
D. J. Ewins, H. Saunders · Journal of vibration and acoustics · 1986 · 2.5K citations · Full text
Modal testing: Theory and practice
James Penny · Journal of Mechanical Working Technology · 1988 · 515 citations
Five parametric resonances in a microelectromechanical system
Kimberly L. Turner, Scott A. Miller, P.G. Hartwell et al. · Nature · 1998 · 462 citations
Engineering, Mechanical Engineering, Microelectromechanical Systems +13