Chemical and phase composition of SnOx:F films grown by DC reactive sputtering

Process modeling of reactive sputtering

S. Berg, Hans‐Olof Blom, Mona Moradi et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1989 · 102 citations

Electrical Engineering, Engineering, Industrial Engineering +12

Reactive Pathways in the Chemical Vapor Deposition of Tin Oxide Films by Tetramethyltin Oxidation

C. G. Borman, Roy G. Gordon · Journal of The Electrochemical Society · 1989 · 42 citations

Materials Science, Tin Oxide, Chemical Engineering +14

Structural, electrical and optical properties of SnO2-x:F-layers deposited by DC-reactive magnetron-sputtering from a metallic target in Ar–O2/CF4 mixtures

R. Mientus, K. Ellmer · Surface and Coatings Technology · 1998 · 31 citations

Materials Science, Dc-reactive Magnetron-sputtering, Magnetic Properties +9

Experimental evidence of compositional mixture in CdTeO films grown by radio-frequency sputtering

A. Iribarren, Eduardo Menéndez‐Proupin, R. Castro-Rodrı́guez et al. · Journal of Applied Physics · 1999 · 19 citations

Optical Materials, Engineering, Radio-frequency Sputtering +18

Discharge diagnosis and controlled deposition of SnOx:F films by DC-reactive sputtering from a metallic tin target

A. Martel, F. Caballero‐Briones, J. Fandiño et al. · Surface and Coatings Technology · 1999 · 18 citations

Materials Science, Electrical Engineering, Engineering +10