Microfabrication of silicon vibrating wires

Resonant silicon sensors

Göran Stemme · Journal of Micromechanics and Microengineering · 1991 · 286 citations

Resonant Sensors, Resonator Materials, Engineering +13

Cooling liquid 3He to around 100 µK

A. M. Guénault, Verna M. Keith, C. J. Kennedy et al. · Nature · 1983 · 56 citations

Engineering, Liquid Metal Cooling, Cryogenics +5

An experimental study of anharmonic micromachined silicon resonators

Frédéric Ayela, Thierry Fournier · Measurement Science and Technology · 1998 · 37 citations

Engineering, Mechanical Engineering, Micro-electromechanical System +17