Publication | Closed Access
Microfabrication of silicon vibrating wires
10
Citations
3
References
2000
Year
VibrationsEngineeringSilicon Vibrating WiresMicrofabricationMechanical EngineeringApplied PhysicsMicroelectronicsMicro-electromechanical System
| Year | Citations | |
|---|---|---|
1991 | 286 | |
1983 | 56 | |
1998 | 37 |
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