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Capillary Force Lithography
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2001
Year
EngineeringMicroscopyMechanical EngineeringPattern TransferBiomedical EngineeringRobust MethodBeam LithographyMaterials FabricationCapillarity PhenomenonPolymer ProcessingLarge-area PatterningPrinted ElectronicsNanolithographyMicrofluidicsCapillary Force LithographyNanolithography MethodMaterials ScienceFabrication TechniqueImprint LithographyMicrofabricationPolymer SciencePolymer CharacterizationNanofabrication
A simple yet robust method for large-area patterning of polymer films—capillary force lithography—is presented here. This method, which combines the essential features of imprint lithography and microcontact printing, allows the replication of features down to 100 nm. The Figure shows a typical pattern.