Plasma damage in p-GaN - Concepedia

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Plasma damage in p-GaN

33

Citations

19

References

2000

Year

Xian Cao, A. P. Zhang, G. Dang, F. Ren, S. J. Pearton, J. M. Van Hove, R. Hickman, R. J. Shul, L. Zhang

Journal of Electronic Materials

EngineeringPhysicsApplied PhysicsGan Power DevicePlasma PhysicsPlasma Damage

References

	Year	Citations

Page 1