Three-dimensional SU-8 sub-micrometer structuring by electron beam lithography

Optical tweezers applied to a microfluidic system

Jonas Enger, Mattias Goksör, Kerstin Ramser et al. · Lab on a Chip · 2004 · 244 citations · Full text

Engineering, Bioengineering, Biomedical Engineering +17

High resolution 100 kV electron beam lithography in SU-8

Brian Bilenberg, Søren Jacobsen, Michael Stenbæk Schmidt et al. · Microelectronic Engineering · 2006 · 100 citations

Natural Sciences, Materials Science, Physics +10

Grey scale structures formation in SU-8 with e-beam and UV

V.A. Kudryashov, Xiaocong Yuan, Wai Chye Cheong et al. · Microelectronic Engineering · 2003 · 82 citations

Natural Sciences, Materials Science, Optics +2

Polymeric Mach-Zehnder interferometer using serially coupled microring resonators

George T. Paloczi, Yanyi Huang, Amnon Yariv et al. · Optics Express · 2003 · 75 citations · Full text

Natural Sciences, Electrical Engineering, Materials Science +17

Integration of microfluidic and microoptical elements using a single-mask photolithographic step

A. R. Leeds, Edward Van Keuren, Michael Durst et al. · Sensors and Actuators A Physical · 2004 · 38 citations

Engineering, Bioengineering, Biomedical Engineering +14