5
Publications
237
Citations
5
H-Index
2006
Active since
Affiliations
Technical University of Denmark(Current)
Michael Stenbæk Schmidt is an author at Technical University of Denmark specializing in engineering, applied physics, and physics.
Top concepts
EngineeringPhysicsMedicineBiochemistryApplied PhysicsMicrofabricationBiosensingPlasmonicsBioanalysisGlycobiology
Publications per year
2006–2021
5
5
High resolution 100 kV electron beam lithography in SU-8
Brian Bilenberg, Søren Jacobsen, Michael Stenbæk Schmidt et al. · Microelectronic Engineering · 2006 · 99 citations
Comparison of high resolution negative electron beam resists
Brian Bilenberg, Mikkel Schøler, Peixiong Shi et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2006 · 37 citations
Electrical Engineering, Engineering, Nanolithography Method +14
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