MRS Proceedings · 1996 · 21 citations · 20 references
EngineeringMaterials EngineeringMaterials ScienceMicrofabricationSemiconductor DevicesThin FilmsCell ManufacturingMicrofabrication MaterialsMicrofabrication ProcessesSilicon MaterialsThin-film DepositionLow-temperature FabricationSiliconSilicon Crystal GrowthSilicon Thin FilmsThin-film Crystallization
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