Morphological study of kinetic roughening on amorphous and microcrystalline silicon surface

Dynamic Scaling of Growing Interfaces

Mehran Kardar, Giorgio Parisi, Yi-Cheng Zhang · Physical Review Letters · 1986 · 5.4K citations

Natural Sciences, Mathematics, Dynamical Systems +13

Semiconductor molecular-beam epitaxy at low temperatures

D. J. Eaglesham · Journal of Applied Physics · 1995 · 196 citations

Natural Sciences, Materials Science, Physics +17

Solid-on-solid rules and models for nonequilibrium growth in 2+1 dimensions

S. Das Sarma, S. V. Ghaisas · Physical Review Letters · 1992 · 123 citations

Natural Sciences, Physics, Condensed Matter Physics +12

<i>I</i> <i>n</i> <i>s</i> <i>i</i> <i>t</i> <i>u</i> spectroscopic ellipsometry study of the growth of microcrystalline silicon

Satyendra Kumar, B. Drévillon, C. Godet · Journal of Applied Physics · 1986 · 111 citations

Natural Sciences, Materials Engineering, Materials Science +17

Role of Surface and Growth-Zone Reactions in the Formation Process of µc-Si:H

Akihisa Matsuda, Toshio Goto · MRS Proceedings · 1989 · 84 citations

Natural Sciences, Materials Engineering, Materials Science +14