Systematic Study of Anodic Etching of Highly Doped N-type 4H-SiC in Various HF Based Electrolytes - Concepedia

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Systematic Study of Anodic Etching of Highly Doped N-type 4H-SiC in Various HF Based Electrolytes

19

Citations

24

References

2013

Year

Gaël Gautier, J. Biscarrat, D. Valente, Thomas Defforge, A. Gary, F. Cayrel

Journal of The Electrochemical Society

Abstract

International audience

References

	Year	Citations

Page 1