Assessment of the adhesion quality of fusion-welded silicon wafers with nonlinear ultrasound

Bonding of silicon wafers for silicon-on-insulator

W. Maszara, Georges Goetz, A.L. Caviglia et al. · Journal of Applied Physics · 1988 · 861 citations

Engineering, Materials Engineering, Materials Science +17

Nonlinear acoustic interaction on contact interfaces and its use for nondestructive testing

Dimitri Donskoy, A. M. Sutin, Alexander Ekimov · NDT & E International · 2001 · 415 citations

Natural Sciences, Mechanical Engineering, Physics +16

Harmonic generation at an unbonded interface—I. Planar interface between semi-infinite elastic media

John M. Richardson · International Journal of Engineering Science · 1979 · 211 citations

Natural Sciences, Materials Engineering, Materials Science +13

Acoustic nonlinearities in adhesive joints

M. Rothenfusser, Melanie Mayr · Ultrasonics · 2000 · 71 citations

Natural Sciences, Mechanical Engineering, Physics +13

Void-free silicon-wafer-bond strengthening in the 200–400 °C range

G. Kissinger, W. Kissinger · Sensors and Actuators A Physical · 1993 · 69 citations

Engineering, Materials Engineering, Materials Science +11